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Control of line width with active nano fountain pen (ANFP) for nano manufacturing
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  • Control of line width with active nano fountain pen (ANFP) for nano manufacturing
  • Control of line width with active nano fountain pen (ANFP) for nano manufacturing
저자명
Hwang. Kyo-Il,Lee. Suk-Han,Kim. Youn-Jea,Kim. Hun-Mo
간행물명
Journal of mechanical science and technology
권/호정보
2008년|22권 7호|pp.1339-1348 (10 pages)
발행정보
대한기계학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

In this paper, modeling of ANFP (active nano fountain pen) and a nano size line control system with ANFP based on fuzzy algorithm is developed. It was found that line width is affected directly with initial mass of meniscus; velocity of patterning and concentration of ink directly affect line width. The control algorithm using the result of modeling successfully shows that the speed of patterning is increased and a variation of line width is possible compared with DPN (dip pen nano lithograph) and FPN (fountain pen nano lithograph). The control of line width system with ANFP is developed by using fuzzy algorithm. Finally, it is shown that it is possible to develop an effective control of variant line width with the same speed.