Nano-micro hierarchical structures that nanoprotrusions were formed on the network-type microstructures were fabricated using an ultrasonic vibration forming technology. A commercial ultrasonic welding system was used to apply ultrasonic vibration energy. To evaluate the formability of ultrasonic vibration forming, nickel nano-micro hierarchical mold was fabricated and polyethylene (PE) was used as the replication material. The optimal molding time was 3.5 sec for PE nano-micro hierarchical structures. The molding process was conducted at atmospheric pressure.