- Hole 구조 상변화 메모리의 전기 및 열 특성
- ㆍ 저자명
- 최홍규,장낙원,김홍승,이성환,이동영,Choi. Hong-Kyw,Jang. Nak-Won,Kim. Hong-Seung,Lee. Seong-Hwan,Yi. Dong-Young
- ㆍ 간행물명
- 한국마린엔지니어링학회지
- ㆍ 권/호정보
- 2009년|33권 1호|pp.131-137 (7 pages)
- ㆍ 발행정보
- 한국마린엔지니어링학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this paper, we have manufactured hole type PRAM unit cell using phase change material $Ge_2Sb_2Te_5$. The phase change material $Ge_2Sb_2Te_5$ was deposited on hole of 500 nm size using sputtering method. Reset current of PRAM unit cell was confirmed by measuring R-V characteristic curve. Reset current of manufactured hole type PRAM unit cell is 15 mA, 100 ns. And electro and thermal characteristics of hole type PRAM unit cell were analyzed by 3-D finite element analysis. From simulation temperature of PRAM unit cell was $705^{circ}C$.