- 자기예압 공기베어링 스테이지의 3 자유도 운동오차 측정 및 능동 보정
- ㆍ 저자명
- 노승국,김수현,곽윤근,박천홍,Ro. Seung-Kook,Kim. Soo-Hyun,Kwak. Yoon-Keun,Park. Chun-Hong
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2009년|26권 2호|pp.109-117 (9 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This paper presents a linear air bearing stage with compensated motion errors by active control of preloads generated by magnetic actuators with combination of permanent and electromagnets. A 1-axis linear stage motorized with a linear motor with 240mm of travel range is built for verifying this design concept and tested its performances. The three motions of the table are controlled with four magnetic actuators driven by current amplifiers and a DSP based digital controller. Three motion errors were measured combined method with laser interferometer and two-probe method with $0.085{mu}m$ of repeatability for straightness error. The measured motion errors were modeled as functions of the stage position, and compensation were carried out with feedforward control because the characteristics of the motion control with magnetic actuators are linear and independent for each degree-of-freedoms. As the results, the errors were reduced from $1.09{mu}m$ to $0.11{mu}m$ for the vertical motion, from 9.42 sec to 0.18 sec for the pitch motion and from 2.42 sec to 0.18 sec for roll motion.