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Four-beam Interference Optical System for Laser Micro- structuring Using Picosecond Laser
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  • Four-beam Interference Optical System for Laser Micro- structuring Using Picosecond Laser
  • Four-beam Interference Optical System for Laser Micro- structuring Using Picosecond Laser
저자명
Noh. Ji-Whan,Lee. Jae-Hoon,Shin. Dong-Sig,Sohn. Hyon-Kee,Suh. Jeong,Oh. Jeong-Seok
간행물명
Journal of the Optical Society of Korea
권/호정보
2009년|13권 1호|pp.75-79 (5 pages)
발행정보
한국광학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

A four beam interference optical system for laser micro structuring using a pulse laser was demonstrated. The four beam interference optical system using a pulse laser(picosecond laser) can fabricate micro structure on mold material(NAK80) directly. Micro structure on the polymer can be reproduced economically by injection molding of the micro structure on the mold material. The four beam interference optical system was composed by the DOE(Diffractive Optical Element) and two lenses. The laser intensity distribution of four beam interference was explained by an interference optics point of view and by the image optics point of view. We revealed that both views showed the same result. The laser power distribution of a $1{mu}m$ peak pattern was made by the four beam interference optical system and measured by the objective lens and CCD. A $1{mu}m$ pitch dot pattern on the mold material was fabricated and measured by SEM(Scanning Electron Microscopy).