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Crystal growth from melt in combined heater-magnet modules
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  • Crystal growth from melt in combined heater-magnet modules
  • Crystal growth from melt in combined heater-magnet modules
저자명
Rudolph. P.,Czupalla. M.,Dropka. N.,Frank-Rotsch. Ch.,KieBling. F.M.,Klein. O.,Lux. B.,Miller. W.,Rehse. U.,Root. O.
간행물명
한국결정성장학회지
권/호정보
2009년|19권 5호|pp.215-222 (8 pages)
발행정보
한국결정성장학회
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정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Many concepts of external magnetic field applications in crystal growth processes have been developed to control melt convection, impurity content and growing interface shape. Especially, travelling magnetic fields (TMF) are of certain advantages. However, strong shielding effects appear when the TMF coils are placed outside the growth vessel. To achieve a solution of industrial relevance within the framework of the $KRISTMAG^{(R)}$ project inner heater-magnet modules(HMM) for simultaneous generation of temperature and magnetic field have been developed. At the same time, as the temperature is controlled as usual, e.g. by DC, the characteristics of the magnetic field can be adjusted via frequency, phase shift of the alternating current (AC) and by changing the amplitude via the AC/DC ratio. Global modelling and dummy measurements were used to optimize and validate the HMM configuration and process parameters. GaAs and Ge single crystals with improved parameters were grown in HMM-equipped industrial liquid encapsulated Czochralski (LEC) puller and commercial vertical gradient freeze (VGF) furnace, respectively. The vapour pressure controlled Czochralski (VCz) variant without boric oxide encapsulation was used to study the movement of floating particles by the TMF-driven vortices.