- SIMION 시뮬레이터를 이용한 정전렌즈의 빔 집속 성능
- ㆍ 저자명
- 오맹호,정인승,이종항,Oh. Maeng-Ho,Jeong. In-Sung,Lee. Jong-Hang
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2009년|26권 4호|pp.128-133 (6 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Focused-ion-beam (FIB) system is capable of both machining and measuring in nano-scale; hence nano-scale focusing quality is important. This paper investigates design parameters of two electrostatic lenses in order to achieve the best ion beam focusing performance. Commercial SIMION simulator is used to optimize the dimensions of the condenser and objective lenses and investigate the influence of assembly error on focusing quality The simulation results show that the beam focusing quality is not influenced by angle deviation within ${pm}0.02;deg$ and geometrical eccentricity within ${pm}50$ micrometers.