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In-line Automatic Defect Repair System for TFT-LCD Production
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  • In-line Automatic Defect Repair System for TFT-LCD Production
  • In-line Automatic Defect Repair System for TFT-LCD Production
저자명
Arai. Takeshi,Nakasu. Nobuaki,Yoshimura. Kazushi,Edamura. Tadao
간행물명
Journal of information display
권/호정보
2009년|10권 4호|pp.202-205 (4 pages)
발행정보
한국정보디스플레이학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

An automated circuit repair system was developed for enhancing the yield of nondefective liquid crystal panels, focusing on the resist patterns on the circuit material layer of thin-film transistor (TFT) substrates prior to etching. The developed system has an advantage over the parallel conventional system: In the former, the repair conditions depend on the type of resist whereas in the latter, the repair parameters must be fine-tuned for each circuit material. The developed system consists of a resist pattern defect inspection system and a pattern repair system for short and open defects. The repair system performs fine corrections of abnormal areas of the resist pattern. The open-repair system is equipped with a syringe to dispense resist. To maintain a stable resist diameter, a thermal insulator was installed in the syringe system. As a result, the diameter of the dispensed resist became much more stable than when no thermal insulator was used. The resist diameter was kept within the target of $400{pm}100{mu}m$. Furthermore, a prototype system was constructed, and using a dummy pattern, it was confirmed that the system worked automatically and correctly.