- PLD법에 의한 Mg가 첨가된 CuCrO2 박막 성장
- ㆍ 저자명
- 김세윤,이종철,최임식,이준형,김정주,허영우,Kim. Se-Yun,Lee. Jong-Chul,Choi. Im-Sic,Lee. Joon-Hyung,Kim. Jeong-Joo,Heo. Young-Woo
- ㆍ 간행물명
- 한국표면공학회지
- ㆍ 권/호정보
- 2009년|42권 2호|pp.68-72 (5 pages)
- ㆍ 발행정보
- 한국표면공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
We report on the growth of $CuCrO_2$ films using pulsed laser deposition and their structural and electrical transport properties. $CuCrO_2$ thin films were doped with 5 at% Mg for p-type properties. Epitaxial films of $CuCr_{0.95}Mg_{0.05}O_2$ were grown on c-plane sapphire substrates. The effects of growth temperature and oxygen pressure on film properties were investigated. The main phase of delafossite $CuCr_{0.95}Mg_{0.05}O_2$ was appeared above the growth temperature of $600^{circ}C$. The thin film grown at $500^{circ}C$ showed the highest conductivity, reaching 19.6 S/cm while higher growth temperatures over $500^{circ}C$ led to lower conductivity; the thin film grown at $700^{circ}C$ showed 0.02 S/cm.