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광전소자 응용을 위한 무극성 6H-SiC 기판의 특성
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  • 광전소자 응용을 위한 무극성 6H-SiC 기판의 특성
저자명
여임규,이태우,최정우,서정두,구갑렬,이원재,신병철,김영희,Yeo. Im-Gyu,Lee. Tae-Woo,Choi. Jung-Woo,Seo. Jung-Doo,Ku. Kap-Ryeol,Lee. Won-Jae,Shin. Byung-Chu
간행물명
전기전자재료학회논문지
권/호정보
2009년|22권 5호|pp.390-396 (7 pages)
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한국전기전자재료학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

The present research was focused to investigate the quality of non-polar SiC substrates grown by a conventional PVT method for optoelectronic applications. The half part of the PVT-grown 6H-SiC crystal boules was sliced along a-direction and m-direction to extensively analyze non-polar planes and then remaining part of that was sliced along the basal plane to produce wafers. The non-polar SiC m-plane and a-plane exhibited apparent peaks around 2 theta=$120^{circ}$((3-300) plane) and 2 theta=$60^{circ}$ ((11-20) plane), respectively. FWHM values of m-plane measured along a-direction and c-direction were 60 arc see and 57 arcsec respectively, a-plane measured along m-direction and c-direction were 41 arcsec and 51 arcsec respectively. The typical absorption spectra of SiC crystals indicated that each of SiC crystals were the 6H-SiC with fundamental absorption energy of about 3.04 eV. Non-polar planes contained no micropipe on etched surface. The carrier concentration and mobility of non-polar SiC wafers have estimated by Raman spectrum. It was observed that the carrier mobility is low in the area far from seed crystal with compared to other places.