- 다층 다공성 실리콘의 합성과 그 광학적 특성 조사
- ㆍ 저자명
- 김성기,Kim. Sung Gi
- ㆍ 간행물명
- 조선자연과학논문집
- ㆍ 권/호정보
- 2009년|2권 1호|pp.45-49 (5 pages)
- ㆍ 발행정보
- 조선대학교 기초과학연구원
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Electrochemical etching of heavily doped p-type silicon wafers (boron doped, <100> orientation, resistivity; $0.8-1.2m{Omega}/cm$) with different current density resulting two different refractive indices resulted in DBR (Distributed Bragg Reflectors) porous silicon, which exhibited strong in-plane anisotropy of refractive index (birefringence). Dielectric stacks of birefringent porous silicon acting as distributed Bragg reflectors have two distinct reflection bands depending on the polarization of the incident linearly polarized light. This effect is caused by a three-dimensional (in plane and in depth) variation of the refraction index. Optical characteristics of DBR porous silicon were investigated.