- 표면탄성파를 이용한 자이로스코프 개발
- ㆍ 저자명
- 오해관,윤성진,이기근,왕웬,양상식,Oh. Hae-Kwan,Yun. Sung-Jin,Lee. Kee-Keun,Wang. Wen,Yang. Sang-Sik
- ㆍ 간행물명
- 韓國軍事科學技術學會誌
- ㆍ 권/호정보
- 2009년|12권 1호|pp.106-113 (8 pages)
- ㆍ 발행정보
- 한국군사과학기술학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This paper presents a surface acoustic wave(SAW) micro-electro-mechanical-systems(MEMS) interdigital transducer (IDT) gyroscope with 80MHz central frequency on a $128^{circ};YX;LiNbO_3$, which is consisted of a two-port SAW resonator, metallic dots and dual delay lines for the sensor and reference oscillators. Reason for using two delay line oscillators is to extract the gyroscope effect by comparing the resonant frequencies between two oscillators and to compensate the temperature effect. Based on the coupling of modes(COM) simulation, an 80MHz two ports SAW resonator and dual delay line were fabricated and characterized by the network analyzer. Obtained sensitivity was $109Hz/deg{cdot}s^{-1}$ in the angular rate range of $0{sim}1000deg/s$. Good Linearity and superior directivity were observed.