The saturation magnetization and uniaxial anisotropy constant were obtained from magnetization and torque curves measurement in high resistive CoFeHfO thin film. The measured results were used for the analysis of the microwave complex permeability based on Landau-Lifshitz-Gilbert (LLG) theory. The high resistive CoFeHfO thin films showed very low damping constants of ${alpha}$ = 0.014. The results are interpreted in terms of various magnetic phase with very low damping constant, which were existing inside the CoFeHfO thin film, through the linewidth analysis of the ferromagnetic resonance signal with magnetic field.