This paper describes the characteristics of piezoelectric micro power generators by the ANSYS FEA(finite element analysis). The micro power generator was designed to convert ambient vibration energy to electrical power as a ZnO piezoelectric material. To find optimal model in low vibration ambient, the shape of power generator was changed with different membrane width, thickness, length, and proof mass size. Using the ANSYS modal analysis, bending mode and stress distribution of optimal model were analyzed. Moreover, the displacement with the frequency range was analyzed by harmonic analysis. From the simulation results, the resonance frequency of optimal model is about 373 Hz and investigate the possibility of ZnO micro power generator for ambient vibration applications.