Latex modified concrete (LMC) exhibits improved material properties including high tensile strength and durability compared with conventional concrete, and hence LMC has been used as protective layers over the bridge deck slabs to increase their service life with underlying assumption of excellent bond behavior between the LMC overlay and the concrete substrate. In this study, the effect of the primary parameters of the concrete substrate (i.e., shrinkage, stiffness and cracking capacity) as well as the LMC overlay thickness on the probability of cracking of the bridge deck slabs using LMC overlays was investigated by carrying out the finite element analysis that simulated the bond behavior of LMC overlays on normal strength concrete (NSC) and HPC bridge deck slabs. Based on the results of the numerical analysis, it is concluded that the relatively high shrinkage strains and stiffness of HPC slabs can increase its probability of cracking in bridge deck slabs using LMC overlay.