The removal characteristics for aromatic and aliphatic VOCs by electron beam (EB) were discussed in terms of several removal variables such as initial VOC concentration, absorbed dose, background gas, moisture content, reactor material and inlet temperature. It was reviewed that only reactor material was an independent variable among the potential control factors concerned. It was also suggested that main mechanism by EB should be radical reaction for the VOC removal rather than that by primary electrons. It was discussed that the removal efficiency of benzene was lower than that of hexane due to a closed benzene ring. In the case of aromatic VOCs, it was observed that the decomposition of the VOCs with more functional groups attached on the benzene ring was much easier than those with less ones. As for aliphatic VOCs, it was also implied that the longer carbon chain was, the higher the removal efficiency became. An EB-catalyst hybrid system was discussed as an alternative way to remove VOCs more effectively than EB-only system due to much less by-products. This hybrid included supporting materials such as cordierite, Y-zeolite, and $gamma$-alumina.