- 광학 필터를 사용한 고해상 고체침지 렌즈 기반 근접장 현미경 적용 가능성에 대한 연구
- ㆍ 저자명
- 문형배,윤용중,김태섭,박영필,박노철,박경수,Moon. H.B.,Yoon. Y.J.,Kim. T.S.,Park. Y.P.,Park. N.C.,Park. K.S.
- ㆍ 간행물명
- 정보저장시스템학회논문집
- ㆍ 권/호정보
- 2010년|6권 2호|pp.79-82 (4 pages)
- ㆍ 발행정보
- 정보저장시스템학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In optical imaging systems, such as microscopes, high resolution exposure systems, and optical storage devices, higher optical resolution is a requirement. One of the promising technologies that is able to satisfy this requirement with relatively simple construction and reliable performance are, solid immersion lens (SIL)-based near-field (NF) optical systems. High NA optical systems using annular apertures have been investigated as one solution to achieve higher resolutions and an extended focal depth. By applying an optimized annular aperture to convention SIL optical head resolution can be increased by approximately 20%. This novel SIL-based near-field optics will be verified through experiments such as measuring focused beam spot profiles and observing the topology of a measurement sample. The studied SIL-based near-field optics can be applicable to not only next generation optical storage device but also high resolution microscopy and pattering technologies.