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서지반출
Development of In-process Visualization System for Laser-assisted Three-dimensional Microfabrication using Photocatalyst Nanoparticles
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  • Development of In-process Visualization System for Laser-assisted Three-dimensional Microfabrication using Photocatalyst Nanoparticles
  • Development of In-process Visualization System for Laser-assisted Three-dimensional Microfabrication using Photocatalyst Nanoparticles
저자명
Matsuda. Keisuke,Takahashi. Satoru,Takamasu. Kiyoshi
간행물명
International journal of precision engineering and manufacturing
권/호정보
2010년|11권 6호|pp.811-815 (5 pages)
발행정보
한국정밀공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

Recently, microfabrication technology has been used to develop micro-electro-mechanical systems (MEMSs), micro-total analysis systems (${mu}$-TASs), and photonic crystals. Various microfabrication techniques have been proposed; however, a technique that can be used to efficiently fabricate 3-D structures via a simple procedure has not been reported thus far. Because 3-D metal structures have not only mechanical functions but also electromagnetic functions, it is desirable to develop such a technique. Our research group is in the process of developing a new technique for 3-D microfabrication that involves the use of a lower power continuous wave laser. Our technique is characterized by the reduction of silver ions via the photocatalysis of titanium dioxide (TiO2) excited at the laser beam waist. For the analysis and development of our microfabrication technique, we developed a microscope system that enabled us to observe the microfabrication process along the fabrication beam optical axis and its radial direction. We successfully visualized the microfabrication process in 3-D. The visualization showed that when the beam waist was swept, the silver structure grew in 3-D following its path. The effect of the substrate on the deposition condition was examined.