Conventional actuators still play the most important roles in motion control of automated machines. However, for advanced machines and instruments with higher performance, the conventional motors seem to be difficult to satisfy the coming sophisticated demands. So, the development of innovative actuators is recognized as one of the most important subjects of the key technology for next generation. Present state of the technology related to innovative actuators is introduced with some examples developed in a national project for new actuators. Essentials to develop a new actuator and to put it to practical use are also commented.