혼합소스 hydride vapor phase epitaxy(HVPE) 방법으로 CuInGaSe(CIGS) 혼합 소스를 형성하였다. 각 금속들은 일정 비율로 혼합하였고, $1090^{circ}C$에서 1시간 30분간 soaking 하였다. 혼합된 소스를 분말형태로 만든 후, 직경 10 mm 크기의 pellet을 만들었다. 시료는 혼합소스 HVPE 에서 소성 한 후 e-beam 으로 Mo이 증착된 기판 위에 증착하였다. Scanning electron microscope(SEM), Energy dispersive X-ray spectrum(EDS) 그리고 X-ray diffraction(XRD) 측정을 통하여 그 특성을 분석하였으며 박막의 특성은 (112), (204)/(220), (116)/(312)그리고 (400) 방향 등의 다결정 특성을 나타내었다.
CuInGaSe(CIGS) mixed-source was prepared by hydride vapor phase epitaxy (HVPE). Each metal was mixed in regular ratio and soaked at $1090^{circ}C$ for 90 minutes in nitrogen atmosphere. After making the mixed-source to powder state, the pellet was made by the powder. The diameter of pellet is 10 mm. The CIGS thin film was deposited on soda lime glass evaporated Mo layer bye-beam evaporator. To confirm the crystallization, we measured X-ray diffraction (XRD). High intensity X-ray peaks diffracted from (112), (204)/(220), (116)/(312) and (400) of CIGS thin film and from (110) of Mo were confirmed by XRD measurement.
