The relative contributions of physical and chemical processes to the production of ozone ($O_3$) were evaluated based on an integrated process rate (IPR) analysis using the MM5/CMAQ in a downtown (i.e., Yangsan_U) and suburban area (i.e., Ungsang) on high ozone days during spring and summer in 2006 (28 April and 8 August 2006). The IPR includes a horizontal advection (HADV) and diffusion (HDIF), a vertical advection (ZADV) and diffusion (VDlF), a dry deposition (DDEP), and a chemistry (CHEM). The VDIF in Yangsan_U was found to be the most dominant contributor (29.5% in spring and 32.1% in summer) to high $O_3$ concentrations, followed by the HADV and ZADV. In contrast, the contributions of the HADV (40.3% in spring and 32.3% in summer) in Ungsang were significantly higher than those of VDIF and ZADV. Moreover, $O_3$ production due to the chemical effect in the two areas (especially in Ungsang) during summer was found to be moderately higher than that during spring.