- 졸겔 법으로 제조한 압전 센서용 PZT 박막의 결정 배향 및 전기적 특성 연구
- ㆍ 저자명
- 변진무,이호년,이홍기,이성의,이희철,Byun. Jin-Moo,Lee. Ho-Nyun,Lee. Hong-Kee,Lee. Seong-Eui,Lee. Hee-Chul
- ㆍ 간행물명
- 센서학회지
- ㆍ 권/호정보
- 2010년|19권 3호|pp.202-208 (7 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This study examined the dependency of crystalline orientation and electric properties of sol-gel PZT film on hydrolysis, a $PbTiO_3$ seed layer and a concentration of sol-gel solution. The PZT thin films were prepared by using 2-Methoxyethanol-based sol-gel method and spin-coating on Pt/Ti/$SiO_2$/Si substrates. The 1-${mu}m$-thick PZT films were coated and then fired in a furnace by direct insert method. The highly (111) oriented PZT film of pure perovskite structure could be obtained. We could control the degree of orientation by various parameters such as hydrolysis, a $PbTiO_3$ seed layer and a concentration of sol-gel solution. The highest measured remanent polarization, dielectric constant and piezoelectric coefficient are $24.16;{mu}C/cm^2$, 2808, and 159 pC/N, respectively.