- 비정질 InGaZnO4 박막의 전기적, 광학적 특성간의 상관관계 연구
- ㆍ 저자명
- 배성환,유일환,강석일,박찬,Bae. Sung-Hwan,Yoo. Il-Hwan,Kang. Suk-Ill,Park. Chan
- ㆍ 간행물명
- 한국세라믹학회지
- ㆍ 권/호정보
- 2010년|47권 4호|pp.329-332 (4 pages)
- ㆍ 발행정보
- 한국세라믹학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In order to investigate the effect of tail state on the electrical and the optical properties in amorphous IGZO(a-IGZO), a-IGZO films were deposited at room temperature on fused silica substrats using pulsed laser deposition method. The laser pulse energy was used as the processing parameter. In-situ post annealing was carried out at $150^{circ}C$ right after the film deposition. The $O_2$ partial pressure during the deposition and the post annealing was fixed to 10mTorr. The carrier mobility of the a-IGZO films had a range from 2 to $18;cm^2/Vs$ at carrier concentrations greater than $10^{18};cm^{-3}$. As the laser energy density increased, the Hall mobility increased. And post annealing improved the Hall mobility, as well. The optical property was examined using the ultraviolet-visible spectroscopy. The a-IGZO films that have low Hall mobility exhibited stronger and broader absorption tails in >3.0 eV region. Post annealing reduced the intensity of the tail-like absorption. The absorption tail in a-IGZO films is an important factor which affects the electrical and the optical properties.