Titania-silica composite materials were obtained by sol-gel method from TiCl4 and TEOS precusors, and they were applied to anode materials of lithium ion battery. Uniformly distributed composite materials can be manufactured by sol-gel method. The composite materials were heat treated by microwave to obtain materials with new properties. The experimental variables were composition of the material, heat treatment temperature, and microwave exposure. The structure and surface properties of the materials were analyzed by XRD, SEM, and the electrochemical capacity was measured with charge/discharge cycler.