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An ultra-high pressure sensor based on SOI piezoresistive material
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  • An ultra-high pressure sensor based on SOI piezoresistive material
  • An ultra-high pressure sensor based on SOI piezoresistive material
저자명
Zhao. Yulong,Fang. Xudong,Jiang. Zhuangde,Zhao. Libo
간행물명
Journal of mechanical science and technology
권/호정보
2010년|24권 8호|pp.1655-1660 (6 pages)
발행정보
대한기계학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

This paper describes an ultra-high pressure sensor which is in urgent need and widely used in defense industry and petroleum industry. It is designed on the combination of micro Silicon on Insulator (SOI) solid piezoresistive chip based on Micro Electro Mechanical Systems (MEMS) technique and cylindrical elastic body that could successfully convert dynamic ultra-high pressure measurement in explosion to strain measurement. Performances of the sensor including size, sensitivity, and linearity are investigated with experiment data. It’s proved that the dynamic ultra-high sensor in the range of 2GPa in this paper is successful in pressure measurement in explosion. The research of ultra-high pressure sensor in this paper could not only provide a reference for the improvement of explosive property, but also lay a foundation for research of pressure sensor in the range of 10GPa of the next step.