- 반도체 부품 마크 미세 결함 검사를 위한 패턴 영역 분할 및 인식 방법
- ㆍ 저자명
- 장유정,이정섭,주효남,김준식,Zhang. Yuting,Lee. Jung-Seob,Joo. Hyo-Nam,Kim. Joon-Seek
- ㆍ 간행물명
- 제어·로봇·시스템학회 논문지
- ㆍ 권/호정보
- 2010년|16권 9호|pp.913-917 (5 pages)
- ㆍ 발행정보
- 제어로봇시스템학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
To inspect the defects of printed markings on the surface of IC package, the OCV (Optical Character Verification) method based on NCC (Normalized Correlation Coefficient) pattern matching is widely used. In order to detect the micro pattern defects appearing on the small portion of the markings, a Partitioned NCC pattern matching method was proposed to overcome the limitation of the NCC pattern matching. In this method, the reference pattern is first partitioned into several blocks and the NCC values are computed and are combined in these small partitioned blocks, rather than just using the NCC value for the whole reference pattern. In this paper, we proposed a method to decide the proper number of partition blocks and a method to inspect and combine the NCC values of each partitioned block to identify the defective markings.