To obtain high performance microfiber knit wiping cloth used for manufacturing electronic devices benzyl alcohol pretreatment method was optimized. WAXD patterns of the PET, nylon and nylon/polyester filament fibers pretreated with benzyl alcohol showed stronger crystalline peak than 50d/14f fibers. Some properties including wiping efficiency of the wiping cloths made of 75d/36f filament fibers of nylon/PET(N/P) and the ones made of 50d/14f fibers were tested and compared. Results showed that water absorption rate of the former was higher than that of the latter. The former showed excellent removing efficiency of approximately 90% compared to 60% for the latter. Air particle counter analysis revealed that the former has less residue content than the latter.