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Transmission Electron Microscopy Observation of a Single Ni Dot Fabricated Using Scanning Tunneling Microscopy
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  • Transmission Electron Microscopy Observation of a Single Ni Dot Fabricated Using Scanning Tunneling Microscopy
  • Transmission Electron Microscopy Observation of a Single Ni Dot Fabricated Using Scanning Tunneling Microscopy
저자명
Hong. Chul-Un,Kang. Hyung-Sub,Kim. Seong-Jong,Kang. Sung-Jun,Kim. Gi-Beum
간행물명
International journal of precision engineering and manufacturing
권/호정보
2010년|11권 3호|pp.469-472 (4 pages)
발행정보
한국정밀공학회
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정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Recent developments in high-technology experimental equipment and semiconductor micro fabrication technology have made it possible to study various characteristic quantum phenomena such as quantized conductance and coulomb-blockade effects at the nano-scale level. One recent study attempted to fabricate a normal-super-normal double tunneling junction in a split-gate wire. In this study, we describe the results of transmission electron microscopy (TEM) observation of a single 100 nm wide and 200 nm high Ni dot, which had been fabricated using scanning tunneling microscopy (SEM), placed on the top of the bridge of a Si-doped GaAs epitaxial layer grown by molecular beam epitaxy using a Riber 32 apparatus. The results from the successful use of TEM to observe the results of a SEM fabrication procedure support the contention that the fabricated Ni dot became a poly-crystal that was amorphous between GaAs crystal and a surface dot fabricated by applying voltage pulse to a STM tip, covered by an oxygenated film approximately 20 nm thick.