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저자명
황주호,박천홍,Hwang. Joo-Ho,Park. Chun-Hong
간행물명
한국정밀공학회지
권/호정보
2010년|27권 7호|pp.94-100 (7 pages)
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한국정밀공학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

This paper describes the design and evaluation procedure of an ultra-precision rotary table for freeform generating machined tools. Design of the thrust and journal hydrostatic bearings and experimental evaluation of the table were performed. To get the compact size and less lost motion direct drive servomotor with ultra precision encoder. From the considered design, following performance were confirmed by experiment. The total stiffness of the prototype rotary table was 483.6 $N/{mu}m$ and 97.6 $N/{mu}m$ for axial and radial direction, respectively. Rotational accuracy of the table was investigated by capacitive sensor and reversal measurement technique, and 0.10 ${mu}m$ radial direction and 0.05 ${mu}m$ axial direction of the rotational accuracy were confirmed. The micro resolution of the table was also investigated with displacement of capacitive sensor, and $0.5/10000^{circ}$ of micro resolution was confirmed. Index accuracy of the table was evaluated by the autocollimator and polygon mirror, and the $pm0.39$ arcsec accuracy and $pm0.16$ arcsec repeatability of the table were confirmed. Those are under the general requirements of ultra precision rotary tables for freeform generating machined tools.