- 저온에서 증착한 CdSe막의 구조적 및 전기적 특성
- ㆍ 저자명
- 박기철,마대영,Park. Ki-Cheol,Ma. Tae-Young
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2010년|23권 10호|pp.776-781 (6 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
CdSe films were deposited on glass substrates (CdSe/glass) by thermal evaporation. Substrate temperature was lowered by cooling substrate holder with liquid nitrogen. Substrate temperatures were $200^{circ}C$, $0^{circ}C$ and $-40^{circ}C$. The crystallographic properties and surface morphologies of the CdSe/glass films were studied by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The optical and electrical properties of the films were investigated by dependence of energy gap, photosensitivity and resistivity on the substrate temperature. CdSe/glass showed energy gap of ~1.72 eV regardless of substrate temperature. The resistivity of the films decreased to $0.5{Omega}cm$ by lowering the substrate temperature to $-40^{circ}C$. The CdSe/glass films prepared at $0^{circ}C$ showed the highest photosensitivity among the films in this study.