- 반도체 공정용 저온 열처리로의 고효율 냉각시스템 설계에 관한 연구
- ㆍ 저자명
- 정두원,서민석,김광선,Jeoung. Du-Won,Suh. Ma-Son,Kim. Kwang-Sun
- ㆍ 간행물명
- 반도체디스플레이기술학회지
- ㆍ 권/호정보
- 2010년|9권 4호|pp.71-76 (6 pages)
- ㆍ 발행정보
- 한국반도체디스플레이기술학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
According to recent changes in industry for semiconductor devices, a low-temperature treatment has become a necessity. These changes relate to size refinement and the development of new materials. While variation in cooling efficiency does not affect the yield when using a high-temperature treatment, uniform cooling efficiency is necessary avoid "inconsistencies/bends" in low temperature treatments. However it is difficult to increase temperature stabilization in low temperature treatments. In this paper, using CFD (Computer Fluid Dynamics), we analyze and manipulate the design and input of the low-temperature system to attempt to control for temperature variations within the quartz tube, of which airflow appears to be a predominant factor. This simulation includes variable inputs such as airflow rate, head pressure, and design manipulations in the S.C.U. (Super Cooling Unit).