- RF 마그네트론 스퍼터링법으로 제작된 ITO 박막의 공정압력 변화에 따른 특성
- ㆍ 저자명
- 정성진,김덕규,김홍배,Jeong. Seong-Jin,Kim. Deok-Kyu,Kim. Hong-Bae
- ㆍ 간행물명
- 반도체디스플레이기술학회지
- ㆍ 권/호정보
- 2010년|9권 4호|pp.83-86 (4 pages)
- ㆍ 발행정보
- 한국반도체디스플레이기술학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The transparent electrode properties of ITO films deposited by RF magnetron sputtering with process pressure were investigated. The ITO thin films was deposited on a glass substrate using a target with 3in diameter sintered at a ratio of $In_2O_3$ : $SnO_2$ (9 : 1). 200-nm-thick ITO thin films were manufactured by various process pressures ($2.0{ imes}10^{-2}$, $7.0{ imes}10^{-3}$ and $2.0{ imes}10^{-3}$ Torr). The optical transmittance and resistivity of the deposited ITO thin films showed a relatively satisfactory result under $10^{-2}$ Torr. For high process pressure, the optical transmittance was below 80%, while for low process pressure, the optical transmittance was above 85%. As a result of of mobility, resistivity and carrier concentration by Hall measurement, we obtained satisfactory properties to apply into a transparent conducting thin film.