In this paper, optimal tuning of a cross-coupled controller linked with the feedforward controller and the disturbance observer is studied to improve contouring and tracking accuracy as well as robustness against disturbance. Previously developed integrated design and optimal tuning methods are applied for developing the robust tuning method. Strict mathematical modeling of the multivariable system is formulated as a state-space equation. Identification processes of the servomechanism are conducted for mechanical servo models. An optimal tuning problem to minimize both the contour error and settling time is formulated as a nonlinear constrained optimization problem including the relevant controller parameters of the servo control system. Constraints such as relative stability, robust stability and overshoot, etc. are considered for the optimization. To verify the effectiveness of the proposed optimal tuning procedure, linear and circular motion experiments are performed on the xy-table. Experimental results confirm the control performance and robustness despite the variation of parameters of the mechanical subsystems.