Recently, as the aged population grows around the world, many medical instruments, devices, and their fabrication processes are developing. Among the devices, a drug delivery stent is a good example for precision machining. Conventional drug delivery stent has problem of the remaining polymer because the drug is coated on the surface with it. If the drug is impregnated into the micro hole array on the stent surface, the polymer can be perfectly eliminated. Micro sized holes are generally fabricated by laser machining however, the fabricated holes do not have an enough aspect ratio to contain the drug or a good surface finish to deliver the stend to blood vessel tissue. To overcome these problems, we propose a vibration-assisted machining mechanism with PZT (Piezoelectric Transducers) for abrication of micro sized holes better. The results indicated that the burr size can be significantly decreased with vibration assisted in nanosecond pulse laser drilling test.