This paper describes an internal flow characteristics of a fuel pressurized blower, used for 1kW domestic fuel cell system. To analyze the flow field inside the diaphragm cavity, compressible unsteady numerical simulation is introduced. SST model with scalable wall function is employed to estimate the eddy viscosity. Moving mesh system is applied to the numerical analysis for describing the volume change of a diaphragm cavity in time. Throughout numerical simulation with the modeling of the inlet and outlet valves in a diaphragm cavity, unsteady nature of an internal flow is successfully analyzed. Force variations on the lower plate of a diaphragm cavity are evaluated in time. It is found that the driving force at the suction stage of a diaphragm cavity is more necessary than that at the discharging stage.