$SF_6$ gas is well known as a global warming gas. Global warming potential of $SF_6$ gas is 22,000 times higher than that of $CO_2$. Recycling of $SF_6$ gas is an essential technology for the sake of the environment and the economy. The recovery processes of $SF_6$ gas studied in this work were liquefaction, distillation, and crystallization processes because these processes were thought to be easily carried to the fields for recycling waste $SF_6$ gas. The processes were simulated and optimized using Aspen plus. The optimization problems were formulated to minimize energy consumption with satisfying product specification and desired recovery. The performance of the processes was compared based on the optimization results. Effects of major process variables on the recovery performance were investigated and optimal operation guide for changing product specification and product recovery was provided.