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Simplified Ground-type Single-plate Electrowetting Device for Droplet Transport
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  • Simplified Ground-type Single-plate Electrowetting Device for Droplet Transport
  • Simplified Ground-type Single-plate Electrowetting Device for Droplet Transport
저자명
Chang. Jong-Hyeon,Kim. Dong-Sik,Pak. James Jung-Ho
간행물명
Journal of electrical engineering & technology
권/호정보
2011년|6권 3호|pp.402-407 (6 pages)
발행정보
대한전기학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

The current paper describes a simpler ground-type, single-plate electrowetting configuration for droplet transport in digital microfluidics without performance degradation. The simplified fabrication process is achieved with two photolithography steps. The first step simultaneously patterns both a control electrode array and a reference electrode on a substrate. The second step patterns a dielectric layer at the top to expose the reference electrode for grounding the liquid droplet. In the experiment, a $5{mu}m$ thick photo-imageable polyimide, with a 3.3 dielectric constant, is used as the dielectric layer. A 10 nm Teflon-AF is coated to obtain a hydrophobic surface with a high water advancing angle of $116^{circ}$ and a small contact angle hysteresis of $5^{circ}$. The droplet movement of 1 mM methylene blue on this simplified device is successfully demonstrated at control voltages above the required 45 V to overcome the contact angle hysteresis.