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Experimental investigation of a process cooling system retrofitted with HFC-404A refrigerant for precise manufacturing application
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  • Experimental investigation of a process cooling system retrofitted with HFC-404A refrigerant for precise manufacturing application
  • Experimental investigation of a process cooling system retrofitted with HFC-404A refrigerant for precise manufacturing application
저자명
Wang. Fu-Jen,Tsai. Kuei-I,Wang. Yao-Jun,Lee. Hao-Chuan
간행물명
Journal of mechanical science and technology
권/호정보
2011년|25권 2호|pp.495-501 (7 pages)
발행정보
대한기계학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Precise-manufacturing facilities, which emphasize accurate and stable machining of the working components to be used in semiconductor industry, cannot function properly without appropriate and precise cooling. HCFC (hydro-chloro-floro-carbon) has been commonly used as the coolant for precise manufacturing facilities; but it is facing the pressing schedule to be phased out. Additionally, the dramatic variation of heat load during high-accuracy and high-speed applications need a critical control of coolant (brine or water) temperature. Use of eco-friendly HFC 404A to replace HFC has been suggested as an effective alternative to alleviate the problems. In this study, the performance of a process cooling system retrofitted with HFC-404A refrigerant was evaluated; the energy efficiency ratio and accuracy of temperature control specific to $-15^{circ}C$ precise manufacturing application were examined. Effects of using thermostatic expansion valve associated with hot-gas by-pass control scheme under different loading conditions have been investigated extensively. The energy efficiency ratio and accuracy of temperature control for the cooling system were measured and analyzed for comparing and evaluating HCFC-22 and HFC-404A using different throttling devices under specific coolant temperatures. The comprehensive studies on improving the accuracy of temperature control and energy-saving efficiencies through different temperature control strategies are presented in this paper.