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Emission Properties from Induced Structural Degradation of a-C:H Thin Film
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  • Emission Properties from Induced Structural Degradation of a-C:H Thin Film
  • Emission Properties from Induced Structural Degradation of a-C:H Thin Film
저자명
Yoo. Young-Zo,Song. Jeong-Hwan
간행물명
Transactions on electrical and electronic materials
권/호정보
2011년|12권 3호|pp.89-92 (4 pages)
발행정보
한국전기전자재료학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Hydrogenated amorphous carbon (a-C:H) films were deposited by plasma enhanced chemical vapor deposition on silicon substrates. a-C:H thin film was irradiated to a typical He-Cd laser to study its emitting properties. The photoluminescence (PL) intensity during the irradiation achieved a maximum value when 2,000 seconds elapsed. Fourier transform infrared measurement revealed a-C:H thin film suffered transformation from a polymer-like to graphite-like phase during laser irradiation. Thermal annealing was done at various temperatures, ranging from room temperature to $400^{circ}C$ in the atmosphere, to investigate structural changes in a-C:H film by heat generation during the emission. PL intensity of a-C:H thin film increased 1.5 times without apparent structural change, as annealing temperature increased up to $200^{circ}C$. However, a-C:H film above $200^{circ}C$ exhibited significant decrease of PL accompanying dehydrogenation. This led to a red shift of the PL peak.