- 원추형 금속 기판의 팁 각도에 따른 탄소 나노튜브 이미터의 전계방출 특성
- ㆍ 저자명
- 김종필,노영록,장한빛,박진석,Kim. Jong-Pil,Noh. Young-Rok,Chang. Han-Beet,Park. Jin-Seok
- ㆍ 간행물명
- 반도체디스플레이기술학회지
- ㆍ 권/호정보
- 2011년|10권 2호|pp.115-119 (5 pages)
- ㆍ 발행정보
- 한국반도체디스플레이기술학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
A tip-type carbon nanotube(CNT)-based field emitter was studied to consider it as electron source for micro-focused x-ray tube. The CNT was grown directly on a metal (tungsten) substrate by using an inductively coupled plasma-chemical vapor deposition (ICP-CVD) method. Prior to CNT growth, the metal substrate was etched to have various tip angles from $10^{circ}$ to $180^{circ}C$ (flat-type). The morphologies and microstructures of all the grown CNTs were analyzed via field-emission SEM. Furthermore, the effects of substrate tip-angles on the emission properties of CNT-based field emitters were characterized to estimate the maximum current density, the turn-on voltage, and the spatial distribution of electron beams. Prolonged long-term stability testing of the CNT emitters was also performed. All the experiment results obtained from this study indicated why a tip-type CNT emitter, compared with a flat-type CNT emitter, would be more desirable for a micro-focused x-ray system, in terms of the emission current level, the focused beam area, and the emission stability.