The purpose of this study is to establish the analysis method for prediction of temperature during cryogenic heat treatment. Experimental cryogenic heat treatment is conducted to observe the phenomena such as boiling of fluid, ice layer on the material surface and to measure the temperature distribution of Al6061 tube. The CFD analysis considering the observed phenomena in the experiment is performed to predict the temperature distribution and convection heat transfer coefficient at each stage of cryogenic heat treatment, in which the boiling of fluid is considered as the multi-phase condition of vapour and liquid. The formation of ice layer on the tube surface is also modeled between material and fluid. The predicted results are in good agreement with the experimental ones. From the results, it is shown that the analysis method can predict the temperature distribution and convection heat transfer coefficient during cryogenic heat treatment.