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A Multi-Channel Gas Sensor Using Fabry-Perot Interferometer-Based Infrared Spectrometer
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  • A Multi-Channel Gas Sensor Using Fabry-Perot Interferometer-Based Infrared Spectrometer
  • A Multi-Channel Gas Sensor Using Fabry-Perot Interferometer-Based Infrared Spectrometer
저자명
Choi. Ju Chan,Lee. June Kyoo,Kong. Seong Ho
간행물명
Journal of sensor science and technology
권/호정보
2012년|21권 6호|pp.402-407 (6 pages)
발행정보
한국센서학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

We report a Fabry-Perot interferometer (FPI)-based multi-channel micro-spectrometer used for multi-gas measurement in the spectral range of $3-5{mu}m$ and its gas sensing performance. The fabricated infrared (IR) spectrometer consists of two parts: an FPI on the top side for selective IR filtering and a $V_2O_5$-based IR detector array on the bottom side for the detection of the filtered IR. Experimental results show that the FPI-based multi-channel gas sensor has reliability and selectivity for simultaneously detecting environmentally harmful gases such as $CH_4$, $CO_2$, $N_2O$ and CO in the spectral range of $3-5{mu}m$. The fabricated FPI-based multi-channel gas sensor also demonstrated that a reliable and selective detection of gas concentrations ranging from 0 to 500 ppm is feasible. In addition, the electrical characteristics demonstrate a superior response performance in regards to the selectivity in the multi-target gases.