- BeCu 금속박판을 이용한 테스트 소켓 제작
- ㆍ 저자명
- 김봉환,Kim. Bong-Hwan
- ㆍ 간행물명
- Journal of sensor science and technology
- ㆍ 권/호정보
- 2012년|21권 1호|pp.34-38 (5 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
We have developed a cost effective test socket for ball grid array(BGA) integrated circuit(IC) packages using BeCu metal sheet as a test probe. The BeCu furnishes the best combination of electrical conductivity and corrosion resistance. The probe of the test socket was designed with a BeCu cantilever. The cantilever was designed with a length of 450 ${mu}m$, a width of 200 ${mu}m$, a thickness of 10 ${mu}m$, and a pitch of 650 ${mu}m$ for $11{ imes}11$ BGA. The fabrication of the test socket used techniques such as through-silicon-via filling, bonding silicon wafer and BeCu metal sheet with dry film resist(DFR). The test socket is applicable for BGA IC chip.