- 두께와 직경 비에 따른 두께진동모드 압전소자의 공진 변위 궤적
- ㆍ 저자명
- 정영호,Jeong. Yeong-Ho
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2012년|25권 2호|pp.105-109 (5 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this study, thickness vibration mode piezoelectric devices for AE sensor application were simulated using ATILA FEM program, and then fabricated. Trajectory resonant displacement and electro mechanical coupling factors of the piezoelectric devices were investigated. The simulation results showed that excellent displacement and electro mechanical coupling factor was obtained when the ratio of diameter/thickness($Phi/T$) was 0.75. The piezoelectric device of $Phi/T$=0.75 exhibited the optimum values of fr= 183 kHz, displacement= $4.44{ imes}10^{-7}[m]$, $k_{33}$= 0.69, which were suitable for the application of AE sensor piezoelectric device.