Optimization procedures of performance analysis for ORC(Organic Rankine Cycle) system are established to the characteristics of low temperature heat sources such as open-type and closed-type. Effective heat recovery and heat extraction related to maximum power of the cycle as well as heat quality and thermal efficiency must be considered in the case of the open-type low temperature heat source. On the other hand, in the case of the closed-type low temperature heat source, only thermal efficiency is important due to constant heat input. In this study, thermal efficiency and exergy efficiency representing a level of close to Carnot cycle are studied, as useful index for the optimization of the ORC system. To validate the results of cycle analysis, those are compared with appropriate experimental data of ORC system as a thermal efficiency point of view.