- 다공성 실리콘 나노선의 제작 및 광학적 특성 분석
- ㆍ 저자명
- 김정길,최석호,Kim. Jungkil,Choi. Suk-Ho
- ㆍ 간행물명
- 한국생산제조시스템학회지
- ㆍ 권/호정보
- 2012년|21권 6호|pp.855-859 (5 pages)
- ㆍ 발행정보
- 한국생산제조시스템학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Silicon nanowires (SiNWs) were fabricated by a metal-assisted chemical etching of Si and the porous structure on their surfaces was controlled by changing the volume ratio of the etching solution composed of hydrofluoric acid, hydrogen peroxide, and deionized water. The concentration of hydrogen peroxide as the oxidant was varied for controlling the porosity of SiNWs. The optical properties of porous SiNWs were unique and very different from those of single-crystalline Si, as characterized by measuring their photoluminescence and Raman spectra for different porosities.