Hollow ITO powders were prepared by using polystyrene powders as a template. The specific gravity of the prepared hollow ITO powders was less than half compared with that of normal ITO spheres. As a result, the mismatch between the specific gravity of ITO and that of polymer solution was reduced. When the prepared hollow ITO powders and the polymer solutions are mixed, some portion of the hollow particles were collapsed and generated lots of small fragments. Thousands of the broken fragments from hollow ITO powders caused the increased contact area between particles and finally resulted in the higher electrical conductivity for the coating solution made of the prepared hollow ITO powders and the polymer solution.