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Growth of O- and Zn-polar ZnO films by DC magnetron sputtering
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  • Growth of O- and Zn-polar ZnO films by DC magnetron sputtering
  • Growth of O- and Zn-polar ZnO films by DC magnetron sputtering
저자명
Yoo. Jin-Yeop,Choi. Sung-Kuk,Jung. Soo-Hoon,Cho. Young-Ji,Lee. Sang-Tae,Kil. Gyung-Suk,Lee. Hyun-Jae,Yao. Takafumi,Chang. Ji-Ho
간행물명
한국결정성장학회지
권/호정보
2012년|22권 1호|pp.1-4 (4 pages)
발행정보
한국결정성장학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

O- and Zn-polar ZnO films were grown by DC magnetron sputtering. Growth of high-quality, single-crystal ZnO thin films were confirmed by XRD and pole figure analysis. O-polar ZnO was grown on an $Al_2O_3$ substrate, which was confirmed by a slow growth rate (378 nm/hr), a fast etching rate (59 nm/min), and by the hillocks on the surface after etching. Zn-polar ZnO was grown on a GaN/$Al_2O_3$ substrate, which was confirmed by a fast growth rate (550 nm/hr), a slow etching rate (28 nm/min), and by pits on the surface after etching. Results from the present study show that it is possible to use DC-sputtering to grow ZnO film with the same polarity as other epitaxial growth methods.