- 폴리머 층 전사 및 처짐 현상을 이용한 곡선 형태의 PMMA 나노채널 제작
- ㆍ 저자명
- 조영학,김성동,황지홍,Cho. Young-Hak,Kim. Sung-Dong,Hwang. Ji-Hong
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2012년|29권 1호|pp.114-120 (7 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
We present a simple and low-cost method to fabricate poly(methyl-methacrylate) (PMMA) nanochannels with various shapes by combining the standard optical lithography with a PMMA layer transfer and collapse technique. We utilized PMMA membrane reflowing/collapsing phenomena into microchannels to fabricate nanochannels at both corners of arbitrarily-shaped microchannels. This allows nanochannels with various shapes such as curved nanochannels as well as straight nanochannels to be easily fabricated since the shape of the microchannel determines the shape of the nanochannels. This nanochannel fabrication method is simple, flexible, and low-cost since the standard optical lithography with low-resolution optical masks can be used to fabricate nanoscale channels as small as 100 nm wide with various shapes. Also, the sealing of nanochannels can be naturally achieved while the nanochannels are formed through the polymer layer transfer and collapse.