In micromanufacturing and nanomanufacturing in the semiconductor and flat panel display industry, many kinds of positioning system that have a large working area, high speed, and high accuracy are required. In this paper, the design of a mechanically decoupled dual servo (MDDS) stage is proposed and presented. The stage consists of a coarse stage actuated by a linear motor and a fine stage actuated by a voice coil motor. The two stages are required to be developed independently, if possible, to save lead time and ensure the security of trade secrets; therefore, the MDDS stage is designed according to a modular design approach. A dual servo tracking controller is introduced for the MDDS by appending a fine controller to a conventional coarse controller. Despite the modular design without mechanical coupling, a reaction force between the fine stage and coarse stage is generated by the magnetic coupling that is detrimental to positioning and tracking. Therefore, a simple compensator that reduces the effect of the reaction force is also presented. Simulations and experiments are performed to evaluate the performance of the MDDS stage.